@Article{LópezBorRosGalMel:2017:RoLoHy,
               author = "L{\'o}pez, Elvis O. and Borges, F{\'a}bio O. and Rossi, 
                         Alexandre M. and Galvao, Ricardo Magnus Osorio and Mello, 
                         Alexandre",
          affiliation = "{} and {} and {} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)}",
                title = "The role of lower hybrid resonance and helicon waves excitations 
                         in a magnetized plasma for coating production of complex 
                         crystalline structures as hydroxyapatite",
              journal = "Vacuum",
                 year = "2017",
               volume = "146",
                pages = "233--245",
             keywords = "Lower Hybrid Waves, Helicon modes, Hydroxyapatite.",
             abstract = "The non-equilibrium electro-thermodynamic properties of magnetized 
                         plasma produced by a modified radio-frequency magnetron sputtering 
                         system were investigated in detail. The plasma was analyzed using 
                         Hall, Langmuir, and Faraday probes and optical emission 
                         spectroscopy, and numerical simulations were conducted to 
                         determine the electric and magnetic field profiles. It is found 
                         that the occurrence of lower hybrid resonance and excitation of 
                         helicon waves are satisfied locally along the plasma profile (Z). 
                         This unusual effect in magnetron sputtering systems plays an 
                         important role in the increase of the electrons and ions 
                         temperature improving the quality of the films produced. Films of 
                         complex structure as hydroxyapatite that have biomedical 
                         applications were produced along the Z to confirm our plasma 
                         results. The films were characterized by performing grazing 
                         incidence X-ray diffraction using synchrotron radiation, X-ray 
                         photoelectron spectroscopy and atomic force microscopy. The 
                         microstructure analysis of hydroxyapatite films produced at 
                         different Z revealed that films with high crystallinities and with 
                         ideal stoichiometries (Ca/P = 1.67 ± 0.05) were produced within a 
                         magnetic cusp region (26 mm < Z < 32 mm). Based upon the results 
                         from plasma diagnostics and films characterization, we proposed a 
                         model of plasma of this system. The delivered energy by ions 
                         bombardment for films formation was determined and reached values 
                         around 8 eVs\−1Ĺ\−2 and plasma temperature of T 
                         \≈ 10 eV inside the magnetic cusp region. Finally, this 
                         work opens the possibility to produce coatings of other complex 
                         compounds by the fine-tuning of resonant waves and their high 
                         delivered energies in vacuum magnetized plasmas.",
                  doi = "10.1016/j.vacuum.2017.10.002",
                  url = "http://dx.doi.org/10.1016/j.vacuum.2017.10.002",
                 issn = "0042-207X",
                label = "lattes: 1443260585180322 4 L{\'o}pezBorRosGalMel:2017:RoLoHy",
             language = "en",
           targetfile = "lopez-role.pdf",
        urlaccessdate = "27 abr. 2024"
}